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2 x 2 electrooptical switch in silicon-on-insulator waveguide | |
Yan QF; Yu JZ; Chen SW; Fan ZC; Xia JS; Liu ZL; Yan QF Chinese Acad Sci Inst Semicond State Key Lab Integrated Optoelect Beijing 100083 Peoples R China. | |
2003 | |
会议名称 | IEEE Conference on Electron Devices and Solid-State Circuits |
会议录名称 | 2003 IEEE CONFERENCE ON ELECTRON DEVICES AND SOLID-STATE CIRCUITS |
页码 | 91-94 |
会议日期 | DEC 16-18, 2003 |
会议地点 | Kowloon, PEOPLES R CHINA |
出版地 | 345 E 47TH ST, NEW YORK, NY 10017 USA |
出版者 | IEEE |
ISBN | 0-7803-7749-4 |
部门归属 | chinese acad sci, inst semicond, state key lab integrated optoelect, beijing 100083, peoples r china |
摘要 | A 2 x 2 Mach-Zehnder interferometer electrooptical switch integrated in silicon-on-insulator using multimode interference 3-dB couplers as splitter and combiner has been proposed and fabricated. Free carriers plasma dispersion effect was utilized to realize light modulation in silicon. Switching operation was achieved at an injection current of 358mA and which can be much reduced by optimizing the PIN structure and improving fabrication process. Extinction ratio of 7.7dB and crosstalk of 4.8dB has been observed. |
关键词 | Devices |
学科领域 | 光电子学 |
主办者 | IEEE Electron Devices Soc.; IEEE Solid State Circuits.; IEEE Hong Kong Sect.; Hong Kong Univ Sci & Technol.; Fongs Family Fdn. |
收录类别 | CPCI-S |
语种 | 英语 |
文献类型 | 会议论文 |
条目标识符 | http://ir.semi.ac.cn/handle/172111/13575 |
专题 | 中国科学院半导体研究所(2009年前) |
通讯作者 | Yan QF Chinese Acad Sci Inst Semicond State Key Lab Integrated Optoelect Beijing 100083 Peoples R China. |
推荐引用方式 GB/T 7714 | Yan QF,Yu JZ,Chen SW,et al. 2 x 2 electrooptical switch in silicon-on-insulator waveguide[C]. 345 E 47TH ST, NEW YORK, NY 10017 USA:IEEE,2003:91-94. |
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