Knowledge Management System Of Institute of Semiconductors,CAS
Heteroepitaxy of cubic GaN: influence of interface structure | |
Trampert A; Brandt O; Yang H; Yang B; Ploog KH; Trampert A Paul Drude Inst Festkorperelekt Hausvogteipl 5-7 D-10117 Berlin Germany. | |
1997 | |
会议名称 | Royal-Microscopical-Society Conference on Microscopy of Semiconducting Materials |
会议录名称 | MICROSCOPY OF SEMICONDUCTING MATERIALS 1997, (157) |
页码 | 205-208 |
会议日期 | APR 07-10, 1997 |
会议地点 | OXFORD, ENGLAND |
出版地 | TECHNO HOUSE, REDCLIFFE WAY, BRISTOL, ENGLAND BS1 6NX |
出版者 | IOP PUBLISHING LTD |
ISSN | 0951-3248 |
ISBN | 0-7503-0464-2 |
部门归属 | paul drude inst festkorperelekt, d-10117 berlin, germany; chinese acad sci, inst semicond, beijing 100083, peoples r china |
摘要 | We report on the epitaxial growth and the microstructure of cubic GaN. The layers are deposited by plasma-assisted molecular beam epitaxy on GaAs and Si substrates. Despite the extreme lattice mismatch between these materials, GaN grows in the metastable cubic phase with a well-defined orientation-relationship to the GaAs substrate including a sharp heteroboundary. The preference of the metastable phase and its epitaxial orientation originates in the interface structure which is found to be governed by a coincidence site lattice. |
关键词 | Molecular-beam Epitaxy Gan/gaas(001) Growth |
学科领域 | 半导体物理 |
主办者 | Royal Microscop Soc.; Inst Phys, Electron Microscopy & Anal Grp.; Mat Res Soc.; Royal Soc.; JEOL UK Ltd.; Oxford Instruments Ltd. |
收录类别 | CPCI-S |
语种 | 英语 |
文献类型 | 会议论文 |
条目标识符 | http://ir.semi.ac.cn/handle/172111/15099 |
专题 | 中国科学院半导体研究所(2009年前) |
通讯作者 | Trampert A Paul Drude Inst Festkorperelekt Hausvogteipl 5-7 D-10117 Berlin Germany. |
推荐引用方式 GB/T 7714 | Trampert A,Brandt O,Yang H,et al. Heteroepitaxy of cubic GaN: influence of interface structure[C]. TECHNO HOUSE, REDCLIFFE WAY, BRISTOL, ENGLAND BS1 6NX:IOP PUBLISHING LTD,1997:205-208. |
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